0021-84842 | 300MM Slit Valve Door | AMAT | 0021-84842-Shanxi Runsheng

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0021-84842 | 300MM Slit Valve Door | AMAT | 0021-84842

AMAT's 300MM Slit Valve Door boasts micron-level sealing precision and supports rapid opening and closing cycles, meeting the high-frequency operation requirements of wafer transport systems. Employing a slit valve structure, it controls the sealing and opening/closing of vacuum chambers or transport modules, ensuring precise wafer transport in clean environments. AMAT's high-reliability valve assembly is designed for the semiconductor manufacturing and precision industries, and its high-precision sealing, rapid response, and compatibility make it a core component of wafer transport systems.

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Description

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　　0021-84842 Other Names:

　　Applied Materials Door 0021-84842

　　0021-84842 300mm Slit Valve

　　Control Valve 0021-84842

　　Product Core Information

　　Model and Manufacturer: The 0021-84842 300MM Slit Valve Door is manufactured by Applied Materials (AMAT) and is a precision valve component used in semiconductor manufacturing equipment, specifically designed for 300mm wafer transport systems.

　　Technical Positioning: Employs a slit valve structure for sealing and opening/closing control of vacuum chambers or transfer modules, ensuring precise wafer transfer in a clean environment.

　　Core Features:

　　High-Precision Sealing and Control:

　　Micron-level sealing accuracy, supporting rapid opening/closing cycles to meet the high-frequency operation requirements of wafer transfer systems.

　　Integrated vacuum sealing technology prevents gas leakage, maintains chamber vacuum, and ensures semiconductor process stability.

　　Hardware Specifications:

　　Interfaces and Drivers: Compatible with AMAT standard drive systems, supports electric or pneumatic drive modes, and adapts to VME bus or industrial network communication.

　　Physical Design: Compact structure (specific dimensions refer to official documentation), compatible with 300mm wafer transfer modules, weighing approximately 1-2kg (typical range).

　　Environmental Adaptability: Operating temperature range 0-60℃, storage temperature -40℃ to 85℃, corrosion-resistant coating treatment, adaptable to the harsh environments of semiconductor factories.

　　Functionality Expansion:

　　Supports integration with other AMAT modules (such as wafer handling robots and lithography machine workstations) to achieve automated transport path control.

　　Compatible with the AMAT equipment monitoring system, it can be connected to a factory-level MES (Manufacturing Execution System) for remote status monitoring and fault diagnosis.

　　Typical Application Scenarios:

　　Semiconductor Manufacturing: Wafer transport systems, vacuum chamber isolation, wafer loading/unloading control for lithography/etching machines.

　　Industrial Automation: Precision vacuum equipment, cleanroom environment control, material handling in automated production lines.

　　Research and Testing: Laboratory vacuum systems, material deposition equipment, semiconductor testing platforms.

　　Maintenance and Support:

　　Operating Requirements: Installation, calibration, and regular maintenance must be performed by qualified technicians, with a focus on checking seal wear, drive mechanism lubrication, and electrical connection reliability.

　　Maintenance Guidelines:

　　Regularly clean the sealing surfaces and replace aged sealing rings (such as those made of fluororubber or perfluoroether).

　　Check the performance of the drive cylinder/motor to ensure smooth opening and closing without jamming.

　　Verify valve opening and closing position accuracy using a laser calibrator for fine-tuning.

　　Precautions:

　　Compatibility Verification: Before integration, confirm electrical and mechanical interface compatibility with existing equipment (such as wafer handling robots and vacuum pump systems).

　　Safety Standards: Operate in accordance with industrial safety standards, wear anti-static equipment, and avoid contact with high voltage or precision components by non-professionals.

　　Data Security: When industrial network communication is involved, encryption measures must be implemented to prevent data leakage or cyberattacks.

　　Summary:The 0021-84842 300MM Slit Valve Door is a high-reliability valve component developed by AMAT for the semiconductor manufacturing and precision industries. Its high-precision sealing, rapid response, and compatibility advantages make it a core component of wafer transport systems. Users need to combine professional operation, regular maintenance, and official support to ensure long-term stable operation and performance optimization.

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